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- Keywords ITO film;Sheet resistance;Carrier concentration;Spectra; ITO薄膜;面电阻;载流子浓度;光谱;
- Photolithography: forming electrodes in the form required on the ITO film. 光刻:在ITO表面形成要求形状的电极。
- The temperature characteristics of the ITO film measured show that the slope of the conductivity-temperature curve varies from a positive value to a negative one. 最后，测量了ITO薄膜的温度特性，结果显示，方块电阻与温度的关系曲线斜率从正变化到负。
- Keywords ITO;azeotropic drying;nanocrystal powder; 氧化铟锡;共沸干燥;纳米粉体;
- Keywords ITO;sputtering;Indium;wetting;welding; 氧化铟锡;溅射;铟;润湿;焊接;
- High quality ITO films are prepared onto K9 glass substrates by oxygen ion-assisted electron beam reactive evaporation. 采用氧离子辅助电子束反应蒸发工艺在K9玻璃基底上制备了性能优异的ITO薄膜。
- Various fabrication techniques for ITO films currently in use, including magnetron sputtering, CVD, spray-pyrolysis, sol-gel, are discussed. 磁控溅射法、化学气相沉积(CVD)法、喷雾热分解法、溶胶-凝胶法是目前制备ITO薄膜常用的方法。
- ITO films were prepared by r.f. magnetron sputtering, and were annealed in ammonia, nitrogen and air atmosphere respectively. 利用射频磁控溅射在室温玻璃衬底上制备了氧化铟锡(ITO)薄膜,并分别在氨气、氮气和空气气氛下对薄膜进行了热处理。
- Keywords ITO transparent conductive film;Reactive low voltage ion plating;Sheet Resistance;Antireflective film; ITO透明导电膜;低压反应离子镀;方块电阻;减反射膜;
- Furthermore, ITO films have high microwave reflectivity and low infrared emissivity, which may play an important role on radar and infrared stealth technology. 同时ITO薄膜还具有很高的电磁波反射率和较低的红外发射率，这是雷达隐身及红外隐身的关键。
- Some suggestions were presented on the basis of the optimization of ITO films, which is beneficial to the research and fabrication of OLED anode in the future. 对高性能平板显示OLED器件用透明导电阳极的研制具有一定的参考价值。
- Keywords ITO;powder;suspension;chemie douce;aero gel; 粉体;浆料;软化学法;气凝胶;
- Keywords stannic alhoxides;ITO film;sol gel;ammonia method;sodium alkoxide method; 锡醇盐;ITO薄膜;溶胶-凝胶;氨法;醇钠法;
- The etching technologies of ITO films suitable for laboratory operation, including gelatinization, border scouring, exposal, development, etching and so on ,are obtained after a series of experiments. 通过大锖实验摸索了一套适合实验室制作刻蚀ITO膜的工艺，其中包括涂胶、擦边、曝光、显影、刻蚀等。
- The transmission of ITO films is greatly improved by the heat treatments in all atmospheres.The electrical properties of ITO films annealed in ammonia are better than in other two atmospheres. 结果发现在不同气氛下热处理均能明显提高ITO薄膜在可见光区的透过率,氨气气氛下更有利于薄膜导电特性的改善。
- The annealing effects on electrical and optical properties of ITO films under different atmospheres were studied using X-ray diffraction (XRD), Hall Effect and UV-VIS-NIR spectrometer. 利用X射线衍射、霍尔效应、UV-VIS-NIR分光光度计等测试手段对薄膜样品进行表征,研究了不同热处理气氛及温度对ITO薄膜光电特性的影响。
- On-line Plasma Cleaning of Glass Substrates of ITO Film ITO玻璃在线等离子体清洗的研究
- Keywords ITO heater;heat transfer;dynamical microlayer model;pool boiling; ITO加热膜;传热;动态微层模型;池沸腾;
- CONTROLLING DEPOSITION RATE OF ITO FILM BY SPECTROMETRY 光谱法控制ITO膜沉积速率
- Effect of Deposition Parameters on Resistivity of ITO Film 淀积参数对ITO膜电阻率的影响
